残余气体分析仪
RGA100/200/300残余气体分析仪
100，200，300amu系统
好于1amu的分辨率
6个数量级的动态范围
5 × 10−14 Torr检测限
RGA Windows和Labview软件
现场可以更换电子 倍增管和灯丝
RS232和以太网接口
技术指标
质量范围
RGA100 1 to 100 amu
RGA200 1 to 200 amu
RGA300 1 to 300 amu
质量滤波器类型 Quadrupole
探测器类型 Faraday cup (FC), standard Electron multiplier (EM), optional
分辨率 Better than 0.5 amu @ 10 % peak (per AVS std. 2.3) height.
Adjustable to constant peak
width throughout the mass range.
灵敏度 (A/Torr) 2 × 10–4 (FC), <200 (EM). User
adjustable throughout high voltage range. Measured with N2 @ 28 amu with 1 amu full peak width,
10 % height, 70 eV electron energy, 12 eV ion energy, and 1 mA electron emission current.
最小可探测差压 5 × 10–11 Torr (FC),
5 × 10–14 Torr (EM)
Measured with N2 @ 28 amu with 1 amu full peak width, 10 % height, 70 eV electron energy, 12 eV ion energy, and 1 mA electron emission current.
操作压力范围 10–4 Torr to UHV (FC)
10–6 Torr to UHV (EM)
操作温度 70 °C (max.)
烘烤温度 300 °C (without ECU)
CIS100/200/300残余气体分析仪
100，200，300amu系统
1ppm检测
10mTorr最大操作压强
1×10-12Torr检测极限
RGA Windows软件
现场可更换的电子倍增管和灯丝
技术指标
操作
质量范围
CIS100/1 1 to 100 amu
CIS200/1 1 to 200 amu
CIS300/1 1 to 300 amu
质量滤波器类型 Quadrupole
探测器类型 Faraday cup and electron multiplier Resolution Better than 0.5 amu @ 10 % peak (per AVS std. 2.3)
height. Adjustable to constant
peak width throughout mass range.
操作温度 70 °C (max.)
烘烤温度 300 °C (without ECU)
离子发生器
设计 Closed ion source, cylindrical sym- metry, electron impact ionization.
材料 Gold plated SS304
灯丝 Tungsten or ThO2/Ir with firmware protection (field replaceable)
电子能量 25 to 105 eV, programmable Ion energy 4 or 8 eV, programmable
聚集板电压 0 to 150 V, programmable Electron emission 0 to 1 mA, programmable
current
