残余气体分析仪基本介绍
残余气体分析仪(RGA)区划为RGA100、RGA200、RGA300amu三种型号规格,其出色的特性和使用价值是真空泵检测仪的领跑商品。而且SRS出示的残余气体分析仪的价钱不上同行业的一半,每一个RGA系统软件都由一个四级杆探头和电子器件操纵模块构成。即时剖析的windows程序包能够更便捷的用以数据收集和剖析,并可开展远程操作。
具体参数:
质谱范围 RGA100 1 to 100 amu
RGA200 1 to 200 amu
RGA300 1 to 300 amu
质朴滤波器类型 Quadrupole
探测器类型 Faraday cup (FC), standard Electron multiplier (EM), optional
分辨率 Better than 0.5 amu @ 10 % peak height. Adjustable to constant peak width
throughout the mass range.
灵敏度(A/Torr) 2 × 10−4 (FC), <200 (EM).
探测极限 5 × 10−11 Torr (FC),
5 × 10−14 Torr (EM)
测试范围 10−4 Torr to UHV (FC)
10−6 Torr to UHV (EM)
操作温度 70 °C (max.)
烘烤温度 300 °C (without ECU)
离子发生器
结构 Open ion source, cylindrical symmetry, electron impact ionization
材料 SS304 construction
灯丝 Thoriated iridium (dual) with firmware protection. Built-in 1 to 10 W degas ramp-up.
Field replaceable.
电子能量 25 to 105 V, programmable
离子能量 8 or 12 V, programmable
焦点电压 0 to 150 V, programmable
电子输出电流 0 to 3.5 mA, programmable
规格
探针尺寸 8.75" from flange face to top of ionizer
探针孔径 2.0"
探针安装法兰 2.75" CF
Minimum tube I.D. 1.375"
ECU尺寸 3.1" × 4.1" × 9.1" (WHD). Easily separated from the probe for bakeout.
LED指示灯 Power ON/OFF, filament ON/OFF,degas ON/OFF, electron multiplierON/OFF, RS-
232 Busy, Error,Overpressure, Burnt Filament
预热时间 Mass stability ±0.1 amu after 30 minutes
电脑接口 RS-232C, 28,800 baud with highlevel command set
软件 Windows based application
电源要求 24 VDC @ 2.5 amps, male DB9 connector, optional built-in power module for AC
line operation
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